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J-GLOBAL ID:200902274952095379   Reference number:06A1033713

Qualitative Correspondences of Experimentally Obtained Growth Rates and Morphology of Single-Crystal Diamond with Numerical Predictions of Plasma and Gas Dynamics in Microwave Discharges for Various Substrate Holder Shapes

いろいろな基板ホルダ形状でのマイクロ波放電における単結晶ダイヤモンドの実験的に得た成長率と形態のプラズマ及び気体動力学の数値予測との定性的一致
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Volume: 45  Issue: 10B  Page: 8177-8182  Publication year: Oct. 30, 2006 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Carbon and its compounds 

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