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J-GLOBAL ID：200902274952095379   Reference number：06A1033713

Qualitative Correspondences of Experimentally Obtained Growth Rates and Morphology of Single-Crystal Diamond with Numerical Predictions of Plasma and Gas Dynamics in Microwave Discharges for Various Substrate Holder Shapes

いろいろな基板ホルダ形状でのマイクロ波放電における単結晶ダイヤモンドの実験的に得た成長率と形態のプラズマ及び気体動力学の数値予測との定性的一致

Author (7)： YAMADA Hideaki (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN) ,  CHAYAHARA Akiyoshi (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN) ,  MOKUNO Yoshiaki (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN) ,  SODA Yousuke (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN) ,  HORINO Yuji (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN) ,  SHIKATA Shin-ichi (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN) ,  FUJIMORI Naoji (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 45  Issue： 10B  Page： 8177-8182  Publication year： Oct. 30, 2006 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： plasma CVD ,...
Semi thesaurus term： power ,...

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JST classification (1)： Carbon and its compounds  (YB02060D)

Reference (22)：

• A. Chayahara, Y. Mokuno, Y. Horino, Y. Takasu, H. Kato, H. Yoshikawa and N. Fujimori: Diamond Relat. Mater.13(2004)1954.
• Y. Mokuno, A. Chayahara, Y. Soda, Y. Horino and N. Fujimori: Diamond Relat. Mater.14(2005)1743.
• P. Hartmann, R. Haubner and B. Lux: Diamond Relat. Mater.5(1996)850.
• Y.-J. Baik, J.-K. Lee, W.-S. Lee and K.-Y. Eum: J. Mater. Res.13(1998)944.
• K. Hassouni, T. A. Grotjhon and A. Gicquel: J. Appl. Phys.86(1999)134.

Terms in the title (10)： 基板ホルダ ,  マイクロ波放電 ,  単結晶ダイヤモンド ,  実験 ,  成長率 ,  形態 ,  プラズマ ,  気体 ,  動力学 ,  数値予測