Art

J-GLOBAL ID：201102209019552353   Reference number：11A1130776

Extreme ultraviolet emission from discharge-produced Rare-earth plasma

放電励起希土類プラズマからの極端紫外光放射

Author (5)： OTSUKA TAKAMITSU (宇都宮大) ,  HIGASHIGUCHI TAKESHI (宇都宮大) ,  YUGAMI NOBORU (宇都宮大) ,  JIANG Weihua (長岡技科大) ,  ENDO AKIRA (早稲田大)
Material： 電気学会パルスパワー研究会資料  (電気学会研究会資料)
Volume： PPT-11  Issue： 14-17.19-24  Page： 43-48  Publication year： Jun. 03, 2011 
JST Material Number： L4030A  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： *extreme ultraviolet ,  light source ,  rare earth element ,  discharge excitation ,  *radiation characteristic ,  *photolithography ,  manufacturing ,  resolving power ,  *laser-produced plasma ,  EUV light source ,  *plasma
Semi thesaurus term： *EUV ,  rare earth ,  *EUV lithography ,  semiconductor device manufacture ,  resolution ,  *laser produced plasma

JST classification (1)： Spectroscopy and spectrometers in general  (BD07041Q)

Reference (27)：

• (1) D. T. Attwood : Soft X-rays and Extreme Ultraviolet Radiation, Chap 6, Cambrige University Press, Cambridge (2000).
• (2) V. Bakshi' EUV Sources for Lithography, Chap 11, SPIE, Washington (2006).
• (3) H. Tanaka, A. Matsumoto, K. Akinaga, A. Takahashi, and T. Okada : "Comparative study on emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced tin plasmas", Applied Physics Letters, Vol.87, pp.041503-1-041503-3 (2005).
• (4) Y. Ueno, G. Soumagne, A. Sumitani, A. Endo, and T. Higashiguchi : "Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target", Applied Physics Letters, Vol.91, pp 231501-1-231501-3 (2007).
• (5) S. Fujioka, M Shimomura, Y. Shimada, S. Maeda, H. Sakaguchi, Y. Nakai, T Aota, H. Nishimura, N. Ozaki, A. Sunahara, K Nishihara, N. Miyanaga, Y. Izawa, and K Mima "Pure-tin microdroplets irradiated with double laser pulses for efficient and minimum-mass extreme-ultraviolet light source production", Applied Physics Letters, Vol.92, pp.241502-1-241502-3 (2008).

Terms in the title (5)： 放電励起 ,  希土類 ,  プラズマ ,  極端紫外光 ,  放射