Pat
J-GLOBAL ID:201603020585210279
相変化メモリおよび半導体記録再生装置
Inventor:
,
,
,
Applicant, Patent owner:
Agent (1):
筒井 大和
Gazette classification:特許公報
Application number (International application number):2013048050
Publication number (International publication number):2014175528
Patent number:6014521
Application date: Mar. 11, 2013
Publication date: Sep. 22, 2014
Claim (excerpt):
【請求項1】 Sn、Sb、および、Teを含有する記録再生膜を備え、
前記記録再生膜は、
SnTeとSb2Te3からなるSnTe/Sb2Te3超格子相と、
SnSbTe合金相と、
Te相と、
を含む、相変化メモリ。
IPC (2):
H01L 27/105 ( 200 6.01)
, H01L 45/00 ( 200 6.01)
FI (2):
H01L 27/10 448
, H01L 45/00 A
Patent cited by the Patent:
Cited by examiner (6)
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Article cited by the Patent:
Cited by examiner (1)
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Effect of interfacial oxide layer on the switching uniformity of Ge2Sb2Te5-based resistive change me
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