Art

J-GLOBAL ID：201702291694286774   Reference number：17A1003313

Structural and electrical properties of β-FeSi₂ polycrystalline films with low electron density

低電子密度のβ-FeSi₂多結晶膜の構造および電気的特性

Author (6)： TERAI Yoshikazu (Kyushu Inst. of Technol., Fukuoka, JPN) ,  TERAI Yoshikazu (Kagoshima Univ., Kagoshima, JPN) ,  HIGASHI Takahiko (Kagoshima Univ., Kagoshima, JPN) ,  HATTORI Tetsu (Kagoshima Univ., Kagoshima, JPN) ,  OGI Kazuya (Kyushu Inst. of Technol., Fukuoka, JPN) ,  IKEDA Shuya (Kyushu Inst. of Technol., Fukuoka, JPN)
Material： Japanese Journal of Applied Physics  (JJAP)
Volume： 56  Issue： 5S1  Page： 05DD03.1-05DD03.5  Publication year： May. 2017 
JST Material Number： G0520B  ISSN： 0021-4922  CODEN： JJAPB6  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *electron density ,  *silicide ,  *iron compound ,  *thin film ,  *thin film growth ,  *crystal structure ,  *electrical characteristic ,  sputtered deposition ,  magnetron sputtering ,  heating velocity ,  solid phase ,  carrier mobility ,  *electric conduction ,  mechanism ,  transition temperature ,  *iron silicide ,  *polycrystalline thin film ,  electron mobility ,  band conduction ,  conduction mechanism ,  phase (thermodynamics)
Semi thesaurus term： RF magnetron sputtering ,  silicide ,  heating rate ,  crystalline phase

JST classification (3)： Semiconductor thin films  (BK14040E) ,  Crystal structure of inorganic compounds in general  (BK07001T) ,  Electric conduction in crystalline semiconductors  (BM03043X)

Reference (27)：

• See, for example, V. Borisenko, Semiconducting Silicides (Springer, Berlin, 2000).
• D. Z. Chi, Thin Solid Films 537, 1 (2013).
• T. D. Hunt, K. J. Reeson, R. M. Gwilliam, K. P. Homewood, R. J. Wilson, and B. J. Sealy, J. Lumin. 57, 25 (1993).
• D. N. Leong, M. A. Harry, K. J. Reeson, and K. P. Homewood, Appl. Phys. Lett. 68, 1649 (1996).
• M. G. Grimaldi, S. Coffa, C. Spinella, F. Marabelli, M. Galli, L. Miglio, and V. Meregalli, J. Lumin. 80, 467 (1998).

Terms in the title (3)： 電子密度 ,  多結晶 ,  電気的特性