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J-GLOBAL ID:201802226522708899   Reference number:18A1261016

Damage-free highly efficient polishing of single-crystal diamond wafer by plasma-assisted polishing

プラズマ支援研磨による単結晶ダイヤモンドウエハの無損傷高効率研磨【JST・京大機械翻訳】
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Material:
Volume: 67  Issue:Page: 353-356  Publication year: 2018 
JST Material Number: E0026A  ISSN: 0007-8506  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Japanese summary of the article(about several hundred characters).
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Single-crystal diamond (SCD) i...
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On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

Semi thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
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