Research field (5):
Quantum beam science
, Material fabrication and microstructure control
, Applied physics - general
, Thin-film surfaces and interfaces
, Nanostructure chemistry
Research keywords (7):
SIMS
, クラスター
, 量子ビーム科学
, ナノ構造材料
, ノズル
, nano-processing
, cluster ion beam
Research theme for competitive and other funds (7):
2017 - 2021 Ambient SIMS Technique for Liquid-Solid Interface Analysis
2015 - 2018 Development of surface process technology with high speed and no damage by huge composite cluster
2014 - 2016 高反応性中性クラスタービームによる微細パターンエッチング
2011 - 2014 Development of analytical technique for organic materials with massive cluster ion beams
2010 - 2012 Development of Nano-scale structure design and process technology by advanced composite cluster beam
2006 - 2008 Study of nano-structural cluster ion beam generation technology
Toshio Seki, Hiroki Yamamoto, Kunihiko Koike, Takaaki Aoki, Jiro Matsuo. High aspect (>20) etching with reactive gas cluster injection. JAPANESE JOURNAL OF APPLIED PHYSICS. 2022. 61. SI. ARTN SI1007
Masaki Hada, Kotaro Makino, Hirotaka Inoue, Taisuke Hasegawa, Hideki Masuda, Hiroo Suzuki, Keiichi Shirasu, Tomohiro Nakagawa, Toshio Seki, Jiro Matsuo, et al. Phonon transport probed at carbon nanotube yarn/sheet boundaries by ultrafast structural dynamics. CARBON. 2020. 170. 165-173
Toshio Seki, Tomoya Nonomura, Takaaki Aoki, Jiro Matsuo. MeV-SIMS measurement of lithium-containing electrolyte. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. 2020. 479. 229-232
Toshio Seki, Kenta Ishii, Takaaki Aoki, Jiro Matsuo. Secondary ion mass spectrometry measurements under ambient and humid conditions using MeV ions. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. 2020. 38. 3. ARTN 034014
New practical vacuum technology
2019 ISBN:9784860435592
クラスターイオンビーム基礎と応用
日刊工業新聞社 2006
Lectures and oral presentations (259):
Ambient Secondary Ion Mass Analysis with MeV-energy Heavy Ion
(11th International Symposium on Atomic Level Characterizations for New Materials and Devices ’17 (ALC`17) 2017)
Fabrication of 3D structure by double-angled etching with reactive gas cluster injection
(The 39th International Symposium on Dry Process(DPS2017) 2017)
Characterization of Bio-Molecules with GCIBSIMS equipped with MS/MS Spectrometer
(AVS 64th International Symposium & Exhibition 2017 (AVS64) 2017)
Organic Material Analysis with a SIMS System with Q-TOF MS/MS Technique
(The 8th International Symposium on Surface Science (ISSS-8) 2017)
Ambient SIMS using MeV-Energy Heavy Ion
(The 23rd International Conference on Ion Beam Analysis (IBA-2017) 2017)