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J-GLOBAL ID：201101018304570019 Update date: Dec. 21, 2024

Shimizu Yuki

Shimizu Yuki | Shimizu Yuki

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Affiliation and department：
Job title： Professor
Homepage URL (1)： https://lrd.eng.hokudai.ac.jp/

Research field (3)： Manufacturing and production engineering , Machine elements and tribology , Design engineering

Research keywords (3)：超精密制御 , 超精密加工 , 超精密計測

Research theme for competitive and other funds (20)：

2022 - 2025 その場波面制御で自在に操る干渉定在波によるサブμm級自由微細構造の大面積露光創成
2020 - 2024 光コム次元変換光学とその場自律校正法の創出によるサブアトム級3次元超精密計測
2021 - 2024 Trial for the next generation "connected" ultra-precision optical metrology
2020 - 2023 透過フェムト秒レーザ熱検知プローブによる非接触・非破壊サブサーフェス評価への挑戦
2018 - 2021 Form measurement of the next-generation optical components by the dimension-conversion-type multi-beam optical angle sensor capable of detecting multiple information

2018 - 2020 A new method for precision displacement measurement based on the heat-flow detection by a micro thermal sensor combined with grating pattern structures

2015 - 2020 Frontier of the precision optical metrology created by the ultra-precision optical nano-grid reference artifact and the absolute optical scale comb

2015 - 2020 超高精度ナノグリッド基準と光絶対スケールコムの創出が拓く精密光計測フロンティア

2016 - 2019 次世代の超精密ナノ計測を実現する光ナノグリッド基準の自律校正

2015 - 2019 2軸干渉グリッド定在波一括転写と自律的精度保証による次世代光ナノグリッド基準創出

2017 - 2019 Nanometric surface defect inspection based on the heat flow detection and the collaborative development of a compact scale for measurement of a nanometric displacement(Fostering Joint International Research)

2015 - 2018 Defect detection for next-generation smoothly finished substrates based on a heat balance generated at a tiny gap

2015 - 2017 Development of an optical method for evaluation of three-dimensional tool edge form with a high resolution beyond the diffraction limit

2014 - 2016 A study for sub-nanometer ultra-high precision measurement method of micro cutting edge of diamond tool

2013 - 2015 Defect detection method utilizing micro-thermal balance at the nanometric gap for nanometric-smooth surface inspection

2012 - 2015 Development of a three-axis laser autocollimator for measurement of angular error motions of a next-generation ultra-precision positioning stage

2012 - 2014 A new scanning electrostatic force microscope for noncontact surface profile measurement of micro-specimens of bio-optics

2012 - 2014 超精密加工用ダイヤモンド工具刃先のナノ・マイクロ摩耗定量評価技術の開発

2011 - 2013 熱検知接触型センサによるウェハ表面欠陥の高感度検出技術に関する研究

2011 - 2012 Development of the thermal contact sensor for inspection of defects on wafer surface

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Papers (251)：

Nozomu Takahiro, Yuki Shimizu. A Technique for Estimating the Pitch of Interference Fringe Patterns for Pattern Exposure in a Non-Orthogonal One-Axis Lloyd’s Mirror Interferometer. International Journal of Automation Technology. 2024. 18. 1. 18-25
Hiraku Matsukuma, Masashi Nagaoka, Hisashi Hirose, Ryo Sato, Yuki Shimizu, Wei Gao. Repetition Frequency Control of a Mid-Infrared Ultrashort Pulse Laser. International Journal of Automation Technology. 2024. 18. 1. 84-91
Tomoki KITAZUME, Yuki SHIMIZU. A resolution improvement of measuring the pitch deviation of a diffraction scale grating based on the change in angles of diffraction of diffracted beams. Journal of Advanced Mechanical Design, Systems, and Manufacturing. 2024. 18. 4. JAMDSM0036-JAMDSM0036
Hyunsung Lim, Yuki Shimizu. Feasible Resolution of Angular Displacement Measurement by an Optical Angle Sensor Based on Laser Autocollimation. Nanomanufacturing and Metrology. 2023. 6. 1
Nozomu Takahiro, Yuki Shimizu. Demonstration of a non-orthogonal Lloyd’s mirror interferometer with a spatial light modulator for arbitrary two-dimensional pattern fabrication. Optics Letters. 2023. 48. 21. 5475-5475

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MISC (118)：

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Patents (15)：

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Books (3)：

Measurement and Instrumentation
朝倉書店 2017
Micro-Cutting: Fundamentals and Applications
Wiley 2013
Nanofabrication
INTECH 2011 ISBN:9789533079127

Lectures and oral presentations (150)：

Calibration of diffraction scale gratings with a high-precision angle measurement technology
(The 9th International Conference on Nanomanufacturing (nanoMan2024) 2024)
Calibration of Diffraction Scale Grating for Precision Positioning Technology
(The 10th East Asia Mechanical and Aerospace Engineering Workshop (EAMAE2024) 2024)
Laser interference lithography with a spatial light modulator for more flexible micropattern fabrication
(The 3rd International High-level Forum on High-end Measurement Instruments & The 13th International Symposium on Precision Engineering Measurements and Instrumentation (IFMI & ISPEMI 2024) 2024)
Calibration of a reflective-type diffraction scale grating based on the angle of diffraction of diffracted beams for precision positioning technology
(16th Pacific Rim Conference on Lasers and Electro-Optics (CLEO-PR 2024) 2024)
Precise evaluation of a scale grating for precision metrology
(International Conference on Precision Engineering and Sustainable Manufacturing (PRESM2023) 2023)

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Education (3)：

- 2009 Nagoya University Graduate School, Division of Engineering 機械理工学専攻
- 2002 Tohoku University Graduate School, Division of Engineering 機械電子工学専攻
- 2000 Tohoku University Faculty of Engineering 機械電子工学科

Professional career (1)：

博士(工学) (Nagoya University)

Work history (5)：

2021/10 - 現在 Hokkaido University Faculty of Engineering Division of Mechanical and Space Engineering Professor
2020/04 - Department of Finemechanics, Tohoku University Associate Professor
2016/04 - Department of Finemechanics, Tohoku University Associate Professor
2011/02 - 東北大学大学院工学研究科ナノメカニクス専攻 Associate Professor
2002/04 - 2011/01 株式会社日立製作所機械研究所/中央研究所/研究開発本部研究員(2006~)

Committee career (21)：

2024/12 - 現在 The International Society for Nanomanufacturing (ISNM) Fellow
2024/02 - 現在 The Japan Society of Mechanical Engineers (JSME) Fellow
2022/04 - 現在日本機械学会マイクロ・ナノ部門委員
2021/04 - 現在日本トライボロジー学会編集委員
2021/04 - 2023/03 日本機械学会 IIP部門広報委員会委員長

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Awards (28)：

2024/12 - International Society for Nanomanufacturing (ISNM) ISNM Outstanding Scientist Award (Taniguchi Medal)
2024/11 - Conference Committee of ICPE2024 Outstanding Paper Award Development of a modified optical head for measurement of the pitch deviation of a diffraction grating having a pitch narrower than laser wavelength
2024/11 - Conference Committee of ICPE2024 Young Researcher Award Expansion of measuring range of optical angle sensor with light source having multiple longitudinal modes
2022/12 - 一般財団法人FA財団 FA財団論文賞 An absolute surface encoder with a planar scale grating of variable periods
2022/03 - JSPE Best Paper Award An absolute surface encoder with a planar scale grating of variable periods

2021/12 - FA Foundation paper award Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of a large-area two-dimensional scale gratings

2021/03 - Japan Society for Precision Engineering Numata Memorial Award Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings

2019/03 - JSPE Numata Memorial Paper Award Design and testing of a compact non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale grating

2018/11 - IEEE 2018 International Conference on Advanced Manufacturing Best Conference Paper Award Theoretical calculation of the reading output from a micro thermal sensor for precision positioning

2018/06 - 公益財団法人工作機械技術振興財団工作機械技術振興賞(論文賞) An optical lever by using a mode-locked laser for angle measurement

2018/05 - 一般財団法人みやぎ産業科学振興基金みやぎ産業科学振興基金研究奨励賞国家標準にダイレクトにリンクした超高精度・高安定精密角度計測に関する研究

2018/03 - 公益社団法人精密工学会精密工学会論文賞 An optical lever by using a mode-locked laser for angle measurement

2017/11 - 一般社団法人日本機械学会生産加工・工作機械部門一般社団法人日本機械学会生産加工・工作機械部門優秀講演論文表彰 Ultra-precision angle sensor with a mode-locked laser source

2017/11 - The conference Committee of CJUMP2017 The 13th China-Japan International Conference on Ultra-Precision Machining Process (CJUMP2017) Best Paper Award

2017/09 - The conference Committee of ISMTII2017 13th International Symposium on Measurement Technology and Intelligent Instruments 2017 Xi’an (ISMTII2017) Best Paper Award Non-contact detection of surface defects by using a micro thermal sensor

2016/08 - The conference Committee of nanoMan2016 The 5th International Conference on Nanomanufacturing (nanoMan2016) Best Pawer Award Spindle Error Motion Measurement of Concentricity Gage by Using Laser Scan Micrometer

2016/04 - 文部科学省科学技術分野の文部科学大臣表彰若手科学者賞微空間での熱収支と光を応用した超精密ナノ形状計測の研究

2015/11 - The Editorial and Review Committee of the 11th CJUMP Excellent Paper Award Investigation of the Deformation Mechanism of a Copper Workpiece during Nanoindentation by using Molecular Dynamics

2015/11 - The Editorial and Review Committee of the 11th CJUMP The 11th China-Japan International Conference on Ultra-Precision Machining Process (CJUMP2015) Excellent Paper Award Precision Measurement of Slide Straightness of an Ultra-Precision Lathe

2015/06 - 公益財団法人工作機械技術振興財団工作機械技術振興賞・論文賞

2014/09 - International Measurement Confederation (IMEKO) Technical Committee TC14 Excellent Paper Award Design of an optical system for evaluation of edge contour of a diamond cutting tool

2013/11 - Asian Society for Precision Engineering and Nanotechnology ASPEN Young Researcher Award

2012/07 - International Society of Nanomanufacturing Excellent Presentation Award Design of a Micro-sized Thermal Contact Sensor for Inspection of Surface Defects

2012/05 - 一般社団法人日本トライボロジー学会日本トライボロジー学会 2011年度日本トライボロジー学会技術賞ヘッド組み込み型熱検知センサを用いた磁気ディスク表面のナノ微小欠陥検出技術

2010/08 - ASME Information Storage and Processing Systems (ISPS) Division ASME ISPS2010 Best Conference Industry Paper Award

2009/04 - 社団法人日本機械学会 2009年日本機械学会奨励賞 (技術)

2003/03 - 社団法人精密工学会 2002年度精密工学会沼田記念論文賞

2000/12 - 社団法人精密工学会精密工学会東北支部2000年度支部講演会優秀講演奨励賞

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Association Membership(s) (3)：

日本トライボロジー学会 , 精密工学会 , 日本機械学会

※ Researcher’s information displayed in J-GLOBAL is based on the information registered in researchmap. For details, see here.

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