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J-GLOBAL ID：201801019087719457   Update date: Feb. 03, 2024

Toshiyuki Kawaharamura

カワハラムラ トシユキ | Toshiyuki Kawaharamura
Affiliation and department：
Kochi University of Technology School of Systems Engineering

About Kochi University of Technology School of Systems Engineering


Research field  (1)： Inorganic materials
Research keywords  (5)： process engineering ,  analysis of functional thin film ,  thin film fabrication ,  mist dynamics ,  mist CVD
Research theme for competitive and other funds  (11)：
  • 2018 - 2022 Basic research on nanostructure control for the fabrication of ultra-wide bandgap oxide quantum devices by mist CVD
  • 2017 - 2021 Development of a high sensitive hydrogen gas detector based on the photoluminescence property of ZnO-based nanostructures
  • 2017 - 2019 Development of monolithic cavity wavelength converter made of widegap semiconductors
  • 2016 - 2019 ミストCVDによる高耐圧HEMTの作製
  • 2015 - 2019 Development of next generation mist CVD enabling atomic level control & development of oxide quantum devices
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Papers (79)：
  • Yoko Taniguchi, Hiroyuki Nishinaka, Kazuki Shimazoe, Toshiyuki Kawaharamura, Kazutaka Kanegae, Masahiro Yoshimoto. Visible-light absorption of indium oxide thin films via Bi3+ doping for visible-light-responsive photocatalysis. Materials Chemistry and Physics. 2024. 315
  • Naoto Oishi, Tatsuya Yasuoka, Toshiyuki Kawaharamura, Noriko Nitta. Competition between ion beam sputtering and self-organization of point defects for surface nanostructuring on germanium. Journal of Vacuum Science & Technology A. 2023. 41. 6
  • G. T. Dang, T. Yasuoka, T. Kawaharamura. Sub-μm features patterned with laser interference lithography for the epitaxial lateral overgrowth of α-Ga2O3 via mist chemical vapor deposition. Applied Physics Letters. 2021. 119. 4
  • Li Liu, Toshiyuki Kawaharamura, Masahito Sakamoto, Misaki Nishi, Giang T. Dang, Shota Sato. The Quality Improvement of Yttrium Oxide Thin Films Grown at Low Temperature via the Third-Generation Mist Chemical Vapor Deposition Using Oxygen-Supporting Sources. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS. 2021
  • Leila Ghadbeigi, Jacqueline Cooke, Giang T. Dang, Toshiyuki Kawaharamura, Tatsuya Yasuoka, Rujun Sun, Praneeth Ranga, Sriram Krishnamoorthy, Michael A. Scarpulla, Berardi Sensale-Rodriguez. Optical Characterization of Gallium Oxide alpha and beta Polymorph Thin-Films Grown on c-Plane Sapphire. JOURNAL OF ELECTRONIC MATERIALS. 2021. 50. 6. 2990-2998
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MISC (160)：
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Patents (45)：
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Lectures and oral presentations  (20)：
  • GaN MOSFET characteristics of the controlled interface for vertical power devices
    (応用物理学会春季学術講演会講演予稿集(CD-ROM) 2021)
  • Behavior and life time investigation of droplet around high temperature wall.
    (日本機械学会年次大会講演論文集(CD-ROM) 2019)
  • Analysis of mist flow in functional thin film deposition system ”KAGUYA” and optimization of flow path and deposition conditions
    (日本機械学会年次大会講演論文集(CD-ROM) 2019)
  • Observation of micro droplets flowing in high temperature gas phase
    (日本機械学会年次大会講演論文集(CD-ROM) 2019)
  • 高温壁面近傍における液滴挙動と液滴消滅時間に関する研究
    (日本機械学会中国四国支部総会・講演会講演論文集(CD-ROM) 2019)
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Work history (5)：
  • 2019/01 - 現在 Kochi University of Technology School of Systems Engineering Professor
  • 2014/04 - 2018/12 Kochi University of Technology School of Systems Engineering
  • 2005/04 - 2008/03 京都大学大学院 工学研究科電子工学専攻 博士後期課程
  • 2003/04 - 2005/03 京都大学大学院 工学研究科化学工学専攻 修士課程
  • 1999/04 - 2003/03 kyoto University
Committee career (11)：
  • 2017/12 - 現在 日本真空学会関西支部 プログラム委員
  • 2016/01/19 - 現在 日本真空学会関西支部 幹事
  • 2015/04 - 現在 香美市地球温暖化対策地域協議会 会長
  • 2014/01/10 - 現在 薄膜材料デバイス研究会 実行委員
  • 2013/04 - 現在 応用物理学会 プログラム委員
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Association Membership(s) (3)：
CVD研究会 ,  THE JAPAN SOCIETY OF MECHANICAL ENGINEERS ,  THE JAPAN SOCIETY OF APPLIED PHYSICS
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