Art

J-GLOBAL ID：200902273291581542   Reference number：07A0548480

Catalyst-referred etching of silicon

シリコンの触媒参照エッチング

Author (8)： HARA Hideyuki (Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1 Yamadaoka, Suita, Osaka ...) ,  SANO Yasuhisa (Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1 Yamadaoka, Suita, Osaka ...) ,  ARIMA Kenta (Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1 Yamadaoka, Suita, Osaka ...) ,  YAGI Keita (Res. Center for Ultra Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., JPN) ,  MURATA Junji (Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1 Yamadaoka, Suita, Osaka ...) ,  KUBOTA Akihisa (Dep. of Mechanical Engineering and Materials Sci., Kumamoto Univ., JPN) ,  MIMURA Hidekazu (Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1 Yamadaoka, Suita, Osaka ...) ,  YAMAUCHI Kazuto (Dep. of Precision Sci. and Technol., Graduate School of Engineering, Osaka Univ., 2-1 Yamadaoka, Suita, Osaka ...)
Material： Science and Technology of Advanced Materials  (Sci Technol Adv Mater)
Volume： 8  Issue： 3  Page： 162-165  Publication year： Apr. 2007 
JST Material Number： W1262A  ISSN： 1468-6996  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： silicon ,...
Semi thesaurus term： *catalyst-referred etching ,...

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JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Reference (9)：

• H. Hara, Y. Sano, H. Mimura, K. Arima, A. Kubota, K. Yagi, J. Murata, K. Yamauchi, J. Electron. Mater. 35 (2006) L11.
• H. Hara, Y. Sano, H. Mimura, K. Arima, A. Kubota, K. Yagi, J. Murata, K. Yamauchi, Mater. Sci. Forum, in press.
• A. Kubota, H. Mimura, K. Inagaki, K. Arima, Y. Mori, K. Yamauchi, J. Electron. Mater. 34 (2005) 439.
• Y. Ichii, Y. Mori, K. Hirose, K. Endo, K. Yamauchi, H. Goto, Electrochem. Acta 50 (2005) 5379.
• Y. Mori, K. Yamauchi, K. Yamamura, Y. Sano, Rev. Sci. Instrum. 71 (2000) 4627.

Terms in the title (4)： シリコン ,  触媒 ,  参照 ,  エッチング