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Author (2)：
Material：
Volume： 62 Issue： 3 Page： 86-91 Publication year： Mar. 15, 2018
JST Material Number： G0902A ISSN： 0916-1600 Document type： Article
Article type： 解説 Country of issue： Japan (JPN) Language： JAPANESE (JA)
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NAKAMURA YUKINORI
About NAKAMURA YUKINORI
(岡山大 大学院自然科学研究科)
, About 岡山大 大学院自然科学研究科
WAKUI SHINJI
About WAKUI SHINJI
(東京農工大 大学院工学研究院)
About 東京農工大 大学院工学研究院
Material：
システム/制御/情報
(システム制御情報学会誌)
About システム/制御/情報
Volume： 62 Issue： 3 Page： 86-91 Publication year： Mar. 15, 2018
JST Material Number： G0902A ISSN： 0916-1600 Document type： Article
Article type： 解説 Country of issue： Japan (JPN) Language： JAPANESE (JA)
Thesaurus term：
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*vibration isolator
, About vibration isolator
*magnetic bearing
, About magnetic bearing
compensation
, About compensation
*molecular pump
, About molecular pump
Compressed Air
, About Compressed Air
pressure fluctuation
, About pressure fluctuation
phase stabilization
, About phase stabilization
turbo molecular pump
, About turbo molecular pump
*slide bearing
About slide bearing
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
turbo molecular pump
, About turbo molecular pump
vibration isolator
About vibration isolator
JST classification (1)：
JST classification
Category name(code) classified by JST.
Propagation of vibrations
Category name(code) classified by JST.
(BB02040K)
About Propagation of vibrations
Reference (10)：
- [1] 涌井,瓜生,高橋,山本:空圧式除振装置に対する元圧・ 元流量変動フィードフォワード制御;精密工学会誌, Vol. 73, No. 11, pp. 1215-1219 (2007)
- [2] 中村,野口,涌井:除振率を考慮した空圧式アクティブ除振装置に対する流量外乱の一抑制法;電気学会論文誌C, Vol. 134, No. 9, pp. 1182-1190 (2014)
- [3] S. Hara, Y. Yamamoto, T. Omata and M. Nakano: Repetitive control system: A new type servo system for periodic exogenous signals; IEEE Transactions on Automatic Control, Vol. 33, No. 7, pp. 659-668 (1988)
- [4] 中野,井上,山本,原:繰返し制御,コロナ社(1989)
- [5] 中村, 涌井:5 軸能動形磁気軸受の不釣り合い振動補償器に対する一設計法;日本機械学会論文集, Vol. 81, No. 824,pp. 1-14 (2015)
Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
Keywords automatically extracted from the title.
空圧
, About 空圧
除振装置
, About 除振装置
磁気軸受
, About 磁気軸受
周期
, About 周期
補償
About 補償
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