Research field (2)：
Nanomaterials
, Nano/micro-systems
Research keywords (7)：
Microfabrication
, Sensor
, PowerMEMS
, Energy harvesting
, Piezoelectric thin films
, Piezoelectric devices
, MEMS
Research theme for competitive and other funds (3)：
2021 - 2024 Study of multi focused ion beam using ion species generated from ion liquid
2020 - 2022 Ultra-high performance and environment-friendly micro-energy harvesters towards self-powered micro/nano-systems for the Internet of Things
2016 - 2020 Development of multi-focused ion beams for highly functional nano-dimension free processing
Papers (28)：
Le Van Minh, Hiroki Kuwano. Piezoelectric Tantalum Aluminum Nitride Films for Vibrational Micro Energy Harvesters. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2021. 2021-. 242-245
Nguyen Van Chinh, Le Van Minh, Takahito Ono, Hiroki Kuwano. Micromachined Multi-Ion Sources Integrated Micro-Fluidic Channels. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2021. 2021-January. 14-17
Qiu Zheng, Le Van Minh, Hung Hoang Nguyen, Hiroki Kuwano. Mechanical fatigue analysis of AlN/SUS430/AlN heterolayered foils in micromachined devices. Sensors and Materials. 2020. 32. 7. 2463-2473
H. H. Nguyen, L. Van Minh, H. Kuwano. High-rate etching of single oriented AlN films by chlorine-based inductive coupled plasma for vibrational energy harvesters. Journal of Physics: Conference Series. 2019. 1407. 1
N. Moriwaki, L. V. Minh, H. Kuwano. Highly Oriented and Stress Modified Thick AlN Films Deposited on Low Thermal Expansion Alloy Substrates for Flexible Electronics in Harsh Environment. Journal of Physics: Conference Series. 2019. 1407. 1
Piezoelectric Tantalum aluminum nitride grown on stainless steel for low-frequency vibration-driven energy harvesters
(The 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), USA 2022)
Piezoelectric wurtzite nitride thin films for green, high-performance MEMS applications
(The 5th International Conference on Advanced Materials and Nanotechnology, Hanoi, Vietnam 2022)
Vibration-driven micro energy harvesting with piezoelectric materials for IoTs and SDGs
(The 5th International Conference on Advanced Materials and Nanotechnology, Hanoi, Vietnam 2022)
EMIM-BF4 multi-ion sources of micromachined Si external wetted emitters with fluidic feeding-flow confinement: from microfabrication to Si etching evaluation
(The 69th Japanese Society of Applied Physics (JSAP) Spring Meeting 2022, Kanagawa, Japan 2022)
A micromachined ionic liquid ion source array
(The 3rd International Workshop on MEMS and Sensor System 2019 (IWMS 2019) 2019)
2010 - 2013 Tohoku University Graduate Schoool of Engineering Nanomechanics
2006 - 2008 Hanoi University of Technology International Training Institute for Materials Science Materials Science
2001 - 2006 Hanoi University of Technology Institute of Engineering Physics Engineering Physics - Electronic Materials
Work history (8)：
2022/04 - 現在 Tohoku University New Industry Creation Hatchery Center Specially Appointed Associate Professor (Research)
2017/04 - 2022/03 Tohoku University New Industry Creation Hatchery Center Assistant Professor
2016/04 - 2017/03 Tohoku University Graduate School of Engineering, Department of Robotics Assistant Professor
2015/06 - 2016/03 Tohoku University Graduate School of Engineering, Department of Nanomechanics Assistant Professor
2014/10 - 2015/05 Tohoku University New Industry Creation Hatchery Center Researcher for Industry-Academic-Government Collaboration
2014/01 - 2014/09 Tohoku University New Industry Creation Hatchery Center Educational and Research Supporter Personnel
2013/10 - 2013/12 Tohoku University Graduate School of Engineering, Department of Nanomechanics Researcher for Industry-Academic-Government Collaboration
2006/07 - 2010/09 Hanoi University of Technology International Training Institute for Materials Science, MEMS group Research Assistant
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Awards (2)：
2010/10 - Japanese Government (Monbukagakusho: MEXT) Japanese Government (Monbukagakusho: MEXT) Scholarship for PhD. Program (2010-2013)
2010 - The Vietnam Education Foundation (VEF) The Vietnam Education Foundation (VEF) Fellowship for Doctoral Course in the United States of America (Awarded list in 2010)
Association Membership(s) (4)：
IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society Membership
, IEEE Electron Devices Society Membership
, IEEE
, The Japan Society of Applied Physics (JSAP)
