Art

J-GLOBAL ID：201702210079077018   Reference number：17A1007025

Analysis of Resist Removal Phenomenon Using Laser Irradiation

レーザー照射を用いるレジスト除去現象の分析

Author (9)： Kamimura Tomosumi (Department of Electronics, Information and Communication Engineering, Osaka Institute of Technology) ,  Kuramae Hirouki (Department of Robotics, Osaka Institute of Technology) ,  Yamashiro Takayuki (Department of Electronics, Information and Communication Engineering, Osaka Institute of Technology) ,  Nuno Kosuke (Department of Electronics, Information and Communication Engineering, Osaka Institute of Technology) ,  Umeda Yuji (Department of Electronics, Information and Communication Engineering, Osaka Institute of Technology) ,  Tsujimoto Singo (Department of Electronics, Information and Communication Engineering, Osaka Institute of Technology) ,  Nakamura Ryosuke (Science & Technology Entrepreneurship Laboratory, Osaka University) ,  Nishiyama Takashi (Department of Applied Chemistry and Bioengineering, Graduate School of Engineering, Osaka City University) ,  Horibe Hideo (Department of Applied Chemistry and Bioengineering, Graduate School of Engineering, Osaka City University)
Material： Journal of Photopolymer Science and Technology  (フォトポリマー懇話会誌)
Volume： 30  Issue： 3  Page： 291-295(J-STAGE)  Publication year： 2017 
JST Material Number： L0202A  ISSN： 0914-9244  CODEN： JSTEEW  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *photoresist ,  *laser irradiation ,  phenomenon ,  numerical analysis ,  atmospheric pressure ,  wafer ,  compressive stress ,  efficiency ,  Si wafer ,  Finite Element Analysis
Semi thesaurus term： removal efficiency ,  atmospheric pressure ,  Finite Element Analysis

Author keywords (5)： Analysis of resist removal ,  Finite element (FE) method ,  Laser irradiation ,  Removal efficiency ,  Stress

JST classification (2)： Manufacturing technology of solid-state devices  (NC03030V) ,  Applications of lasers  (BD04100V)

Reference (18)：

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Terms in the title (4)： レーザー照射 ,  レジスト ,  現象 ,  分析