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J-GLOBAL ID：200901046419813158   Update date: Mar. 22, 2025

Kubota Akihisa

クボタ アキヒサ | Kubota Akihisa
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Affiliation and department：
Kumamoto University

About Kumamoto University


Job title： Associate Professor
Research field  (2)： Material fabrication and microstructure control ,  Manufacturing and production engineering
Research keywords  (4)： 超精密加工 ,  表面 ,  研磨 ,  精密加工
Research theme for competitive and other funds  (13)：
  • 2023 - 2026 トライボプラズマを援用したダイヤモンド基板の高能率ドライエッチング法の開発
  • 2018 - 2021 Development of high-efficiency wet polishing method for diamond substrate utilizing ultraviolet light / ozone gas
  • 2014 - 2017 Development of process performance for diamond wafers and cutting / grinding tools by ultraviolet irradiation polishing
  • 2017 - 次世代パワーデバイス用窒化ガリウム基板の超精密研磨技術の開発
  • 2013 - 2015 Development of high-efficiency polishing process of the diamond substrate for next-generation power devices
Show all
Papers (67)：
  • Akihisa Kubota, Hiroyuki Yokoi. Highly efficient polishing of single crystal diamond substrates using reactive species generated by triboelectric charging. Materials Letters. 2025. 384
  • Akihisa Kubota. Chemical mechanical polishing of synthetic quartz using UV/ozone-treated CeO2 slurry. Materials Letters. 2025. 382
  • C. Inada, S. Toyama, A. Sugamoto, T. Aono, A. Kubota, K. Kasamura, T. Teraji, S. Shikata. Influence of polishing on diamond epitaxial film using vacuum-ultraviolet assisted polishing. Diamond and Related Materials. 2025. 152
  • Kouki Hasegawa, Shigeru Tanaka, Keiji Kasamura, Nejc Novak, Akihisa Kubota, Kazuyuki Hokamoto. Uniformity of planar shock waves generated by vaporizing foil actuator and its application to microfabrication. The International Journal of Advanced Manufacturing Technology. 2024
  • Yusuke Shirayanagi, Shingo Tomohisa, Keiji Kasamura, Hiroki Toyoda, Takashi Matsumae, Yuichi Kurashima, Hideki Takagi, Akihisa Kubota, Takashi Takenaga. Preparation of GaN-HEMTs Devices Bonded to 150μ m Thick Diamond Substrate. 2024 8th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2024. 2024
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MISC (73)：
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Patents (12)：
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Books (5)：
  • Diamond Polishing Technology Using Ultraviolet Light/ Vacuum Ultraviolet Light
    2023
  • 物理化学ナノ製造プロセスの最前線 単結晶ダイヤモンド基板のドライ/ウエット加工法
    2023
  • Ultra-Fine Polishing Technique for Diamond Substrates and Its Application to Semiconductor Devices with Improved Heat Dissipation Performance
    2022
  • Development of High Precision Polishing Method for Hard-to-Process Semiconductor Materials
    2014
  • The Proposal of an Atom Scale Flattening Method for Wide Bandgap Semiconductor Substrates
    2014
Lectures and oral presentations  (157)：
  • Development of GaN HEMTs using a diamond substrate as a heat spreader
    (電子情報通信学会技術研究報告(Web) 2024)
  • 小径ダイヤモンド電着砥石のトランケーション評価方法の検討
    (精密工学会大会学術講演会講演論文集(CD-ROM) 2024)
  • PCD製切削工具の刃先鋭利化における加熱援用研磨の効果
    (精密工学会大会学術講演会講演論文集(CD-ROM) 2024)
  • Approach to high-precision polishing for large CVD diamond substrates
    (精密工学会大会学術講演会講演論文集 2023)
  • Study on Cutting Edge Truncation for Electroplated Coarse Grained Diamond Wheels
    (精密工学会大会学術講演会講演論文集 2023)
ｍore...
Education (3)：
  • 2002 - 2005 Osaka University Graduate School of Engineering Department of Precision Science and Technology
  • 2000 - 2002 Osaka University Graduate School of Engineering Department of Precision Science and Technology
  • 1996 - 2000 Osaka University School of Engineering Department of Applied Science
Professional career (1)：
  • Doctor of Engineering (Osaka University)
Work history (6)：
  • 2020/04 - 現在 Kumamoto University
  • 2016/04 - 現在 Kumamoto University Unregistered
  • 2012/06 - 2016/03 熊本大学大学院自然科学研究科(工学系)先端機械システム 准教授
  • 2007/04 - 2012/05 熊本大学大学院自然科学研究科(工学系)先端機械システム 助教
  • 2005 - 2006 Kumamoto University Faculty of Engineering
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Awards (9)：
  • 2016/06 - 平成27年度第37次工作機械技術論文賞
  • 2015/06 - 平成26年度第36次工作機械技術論文賞
  • 2015/03 - 平成26年度砥粒加工学会論文賞
  • 2014/11 - 熊本大学研究活動表彰
  • 2013 - 平成24年度第34次工作機械技術振興賞(奨励賞)
Show all
Association Membership(s) (4)：
THE JAPAN SOCIETY OF APPLIED PHYSICS ,  THE JAPAN SOCIETY FOR ABRASIVE TECHNOLOGY ,  THE JAPAN SOCIETY OF MECHANICAL ENGINEERS ,  THE JAPAN SOCIETY FOR PRECISION ENGINEERING
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